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PUBLICATIONS

Response to Public Comments: Building a Metrology Exchange to Innovate in Semiconductors (METIS)

Published

Author(s)

Sidney Bittman, June W. Lau, Gretchen Greene

Abstract

In December 2023, NIST released a publication outlining a proposed data-sharing platform, titled "Building a Metrology Exchange to Innovate in Semiconductors (METIS)." The publication was open to public comment from December 2023 to February 2024 to allow for a diversity of people to contribute their viewpoints and to ensure that stakeholders could provide critical feedback to shape the final paper outlining the vision for this data exchange. NIST received numerous comments and identified trends that fell broadly into four specific categories. In this publication, NIST discusses the trends and themes that emerged and provides thematic responses.
Citation
OTHER - NIST CHIPS 1100-1
Report Number
NIST CHIPS 1100-1
NIST Pub Series
Other
Pub Type
NIST Pubs

Download Paper

https://doi.org/10.6028/NIST.CHIPS.1100-1
Local Download

Keywords

RFI, public comment, semiconductors, microelectronics, metrology, data security, database utility and value, data provenance and traceability, database functionality
Metrology and Data and informatics

Citation

Bittman, S. , Lau, J. and Greene, G. (2024), Response to Public Comments: Building a Metrology Exchange to Innovate in Semiconductors (METIS), OTHER, National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.CHIPS.1100-1, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=957941 (Accessed October 3, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created August 23, 2024
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