@misc{1252191, author = {Sidney Bittman and June W. Lau and Gretchen Greene}, title = {Response to Public Comments: Building a Metrology Exchange to Innovate in Semiconductors (METIS)}, year = {2024}, month = {2024-08-23 04:08:00}, publisher = {OTHER, National Institute of Standards and Technology, Gaithersburg, MD}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=957941}, doi = {https://doi.org/10.6028/NIST.CHIPS.1100-1}, language = {en}, }