Sensing Fabrication Errors in Diffraction Gratings using High Dynamic Range Imaging

Published

July 19, 2019

Author(s)

Sofia C. Corzo Garcia, Johannes A. Soons, Ulf Griesmann

Abstract

We describe the design of a simple instrument for the identification and characterization of fabrication errors in diffraction gratings. The instrument uses an uncooled charge-coupled device (CCD) camera and a high dynamic range imaging process to detect the light scattered off a grating under test in the focal plane of a lens. We demonstrate that the instrument can achieve a dynamic range around nine orders of magnitude and we show that we are able to identify small, periodic fabrication errors in two test gratings that could not be detected with microscopic techniques.

Citation

Optics Express

Volume

27

Issue

15

Pub Type

Journals

Download Paper

https://doi.org/10.1364/OE.27.021880

Keywords

Diffraction gratings, High dynamic range imaging, Fabrication errors

Citation

Corzo, S. , Soons, J. and Griesmann, U. (2019), Sensing Fabrication Errors in Diffraction Gratings using High Dynamic Range Imaging, Optics Express, [online], https://doi.org/10.1364/OE.27.021880 (Accessed October 10, 2025)