TY  - JOUR
AU  - Sofia Corzo
AU  - Johannes Soons
AU  - Ulf Griesmann
C2  - Optics Express
DA  - 2019-07-19
DO  - https://doi.org/10.1364/OE.27.021880
LA  - en
M1  - 27
PB  - Optics Express
PY  - 2019
TI  - Sensing Fabrication Errors in Diffraction Gratings using High Dynamic Range Imaging
ER  -