@article{246476,
  author = {Sofia Corzo and Johannes Soons and Ulf Griesmann},
  title = {Sensing Fabrication Errors in Diffraction Gratings using High Dynamic Range Imaging},
  year = {2019},
  number = {27},
  month = {2019-07-19},
  publisher = {Optics Express},
  doi = {https://doi.org/10.1364/OE.27.021880},
  language = {en},
}