The Zeiss Ultra 60 Field Emission Scanning Electron Microscope (FE-SEM) is a high resolution FE-SEM which provides nanoscale imaging and compositional analysis on substrates ranging from 150 mm diameter wafers down to small pieces. It has superb resolution and image quality at high and low accelerating voltages. The Ultra 60 has a high efficiency in-lens secondary detector for high contrast topographic imaging. It also has an energy selective back scatter detector and a solid state retractable backscatter detector for compositional contrast imaging at both high and low voltages. The Ultra 60 is equipped with an energy dispersive x-ray spectroscopy (XEDS) analysis system for elemental analysis.