NanoFab Tool: Denton Vacuum Infinity 22 Electron Beam Evaporator
The Denton Vacuum Infinity 22 electron beam evaporator vapor deposits thin films and is capable of loading up to six source materials for deposition. The evaporator is equipped with an ion gun to clean substrates prior to deposition and to densify dielectric films during deposition. A rotating planetary substrate holder ensures deposition uniformity on substrates ranging from 150 mm diameter wafers down to small pieces.
Cryogenically pumped chamber has a base vacuum of 1.0 x 10-5 Pa (8 x 10-8 Torr).
Rotating planetary substrate holder provides uniform film deposition.