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Today's electronics have reached a point where sheer computation power has combined form and function as the key driver of large consumer markets. The demand for portable and pervasive electronics with greater functionality promises significant changes over the next decades in how society interacts
The primary degradation process in EUVL tools and satellite instruments begins by the adsorption of water or carbonaceous molecules from the vacuum environment onto the optic surface. The optic is damaged if the molecule undergoes photon-stimulated decomposition before it can (reversibly) thermally
• We have provided general users from industry, academia and national laboratories with a completely new class of X-ray imaging techniques for materials studies (ultra-small-angle X-ray scattering imaging), that we developed from basic concept to DOE-supported operations at the Advanced Photon
A zone plate is an optical element used to separate and focus individual wavelengths of light. The zone plate consists of small circular rings that are opaque to the light separated by gaps, which are transparent. The incident light diffracts from the zone plate at an angle that depends on the
An electron hologram is a fringe modulated image containing the amplitude and phase information of an electron transparent object. The HolograFREE routines
The MIST program has been developed to provide users with a general application to model an integrated scattering system. The program performs an integration of
SCATMECH is an object-oriented C++ class library developed to distribute models for light scattering applications. Included in the library are models for
Beamline 8 is used to study the degradation of surfaces that are irradiated by EUV radiation in the presence of common outgas species. Its multilayer mirror
Beamline 1 separates a swath of light from the synchrotron into two parts. The first part is collected in Beamline 1a by a normal-incidence multilayer mirror
The Synchrotron Ultraviolet Radiation Facility SURF III is operated by the Optical Radiation Group as a stable light source for radiometry and research. SURF
Dual electro-optic frequency comb (DOFC) methods are being developed to enhance detection sensitivity and speed for gas sensing in ultraviolet (UV) region. The