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Nanofabrication / manufacturing

News and Updates

Industry Impacts

Nanolithography Design Tools

Accurate production of nanoscale features on semiconductor chips is essential to their performance, but typical design tools cater to the dominance of straight

Projects and Programs

Magnetic Random Access Memory

The program on magnetic random-access memory develops metrology to determine how spin currents can be generated and used to control and manipulate magnetization

Novel Sources for Focused-ion Beams

Focused beams of ions have a wide range of uses, from nanoscale imaging to the fabrication of nanomaterials. We are developing novel cold-atom based ion sources

Optical grating scatterometry

This program aims to develop standards, methods, and modeling for assessing the periodic structures using optical reflectance and transmittance measurements.

Software

MOSAIC

MOSAIC is a modular analysis toolbox to decode multi-state nanopore data. MOSAIC leverages the underlying physics of the system to considerably increase the

Tools and Instruments

NanoFab Tool: RCA Wet Bench B102

The Reynolds RCA wet bench is used to remove organic and metal contamination from the surfaces of substrates prior to high temperature furnace processing. The