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Database 64 Version 4.0

NIST Electron Elastic-Scattering Cross-Section Database: Version 4.0

No Charge.

Available at:

Version 4.0 of this database provides values of differential elastic-scattering cross sections, total elastic-scattering cross sections, and transport cross sections for elements with atomic numbers from 1 to 96 and for electron energies between 50eV and 300 keV (in steps of 1 eV). The cross sections in the database were provided by Prof. F. Salvat from relativistic theory. Knowledge of elastic-scattering effects is important for the development of theoretical models for quantitative analysis by Auger-electron spectroscopy, X-ray photoelectron spectroscopy, electron microprobe analysis, and analytical electron microscopy. The database is designed to facilitate simulations of electron transport for these and similar applications in which electron energies from 50 eV to 300 keV are utilized. An analysis of available elastic-scattering cross-section data has been published by A. Jablonski, F. Salvat, and C. J. Powell, J. Phys. Chem. Ref. Data 33, 409 (2004).

Features of the database

  • Graphical display of differential elastic-scattering cross sections in different coordinate systems

  • Graphical display of the dependence of transport cross sections on electron energy

  • Display of numerical values of differential elastic-scattering cross sections, total elastic-scattering cross sections, and transport cross sections

  • Download of numerical data into three types of files
                    Javascript object notation (JSON) files
                    Comma separated variable (CSV) files that can be opened by spreadsheet software
                    Text files that can be easily read by user programs

Please click here to view a PDF version of the Users’ Guide (link:

The previous version of this database (Version 3.2) also provides phase shifts. This version of the database is available by clicking here. Version 3.2 operates on a PC with the Windows operating system.

For more information, please contact the
Standard Reference Data Program
National Institute of Standards and Technology
100 Bureau Drive, Stop 6410
Gaithersburg, MD 20899-6410
 1(844) 374-0183 (Toll Free); or data [at] (data[at]nist[dot]gov) (email).

Scientific contact:
Dr. C. J. Powell,
Materials Measurement Science Division,
National Institute of Standards and Technology,
100 Bureau Drive, Stop 8370
Gaithersburg, MD 20899-8370
(301) 975-2534 (voice); (301) 216-1134 (fax); or cedric.powell [at] (cedric[dot]powell[at]nist[dot]gov) (email).

Keywords: Auger electron spectroscopy; cross section; elastic scattering; electron scattering; electron spectroscopy; electron transport; x-ray photoelectron spectroscopy; x-ray spectroscopy; electron-probe microanalysis; analytical electron microscopy; and surface analysis

Created October 27, 2016, Updated May 26, 2021