NIST, Gaithersburg has recently installed a first generation silicon drift detector (SDD) from Photon Imaging and the NIST Boulder microcalorimeter energy dispersive x-ray spectrometer (υcal-EDS) on a JEOL 840 SEM, as shown in Fig. 1. [1,2] The instrument is also equipped with a conventional Si-Li x-ray detector (LINK ISIS 3 position turret) and a JEOL wavelength dispersive x-ray spectrometer. NIST, Gaithersburg staff have had the opportunity to work with these new detector technologies as "users" and to compare preliminary results with conventional systems.
Citation: Microscopy and Microanalysis
Issue: suppl. 2
Pub Type: Journals