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On-Wafer Metrology of a Transmission Line Integrated Terahertz Source
Published
Author(s)
Kassiopeia A. Smith, Bryan T. Bosworth, Nicholas R. Jungwirth, Jerome G. Cheron, Nathan D. Orloff, Christian J. Long, Dylan F. Williams, Richard A. Chamberlin, Franklyn J. Quinlan, Tara M. Fortier, Ari D. Feldman
Abstract
A combination of on-wafer metrology and high-frequency network analysis was implemented to measure the response of transmission-line integrated Er-GaAs and InGaAs photomixers up to 1 THz to support the telecommunication and electronics industry.
Smith, K.
, Bosworth, B.
, Jungwirth, N.
, Cheron, J.
, Orloff, N.
, Long, C.
, Williams, D.
, Chamberlin, R.
, Quinlan, F.
, Fortier, T.
and Feldman, A.
(2020),
On-Wafer Metrology of a Transmission Line Integrated Terahertz Source, CLEO: Laser Science to Photonic Applications, San Jose, CA, [online], https://doi.org/10.1364/CLEO_AT.2020.JTu2G.23
(Accessed October 8, 2025)