On-Wafer Impedance Measurement on Lossy Substrates
Dylan F. Williams, Roger Marks
This paper introduces a new method for measuring impedance parameters in transmission lines fabricated on lossy or dispersive dielectrics. The method, which uses an independent calibration to provide an impedance reference, compares well with conventional techniques when applied to lossless substrates. The effectiveness of the technique is illustrated for resistors fabricated on lossy silicon substrates.