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On-Wafer Impedance Measurement on Lossy Substrates

Published

Author(s)

Dylan F. Williams, Roger Marks

Abstract

This paper introduces a new method for measuring impedance parameters in transmission lines fabricated on lossy or dispersive dielectrics. The method, which uses an independent calibration to provide an impedance reference, compares well with conventional techniques when applied to lossless substrates. The effectiveness of the technique is illustrated for resistors fabricated on lossy silicon substrates.
Citation
IEEE Microwave and Guided Wave Letters
Volume
4
Issue
6

Citation

Williams, D. and Marks, R. (1994), On-Wafer Impedance Measurement on Lossy Substrates, IEEE Microwave and Guided Wave Letters, [online], https://doi.org/10.1109/75.294283 (Accessed July 13, 2024)

Issues

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Created June 1, 1994, Updated November 10, 2018