Virtual Metrology White Paper - INTERNATIONAL ROADMAP FOR DEVICES AND SYSTEMS(IRDS) 2017 Edition

Published: April 09, 2018

Author(s)

Ndubuisi G. Orji, Yaw S. Obeng, Carlos Beitia, Supika Mashiro, James Moyne
Citation: IEEE-INTERNATIONAL ROADMAP FOR DEVICES AND SYSTEMS (IRDS)
Pub Type: Others

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Keywords

VIRTUAL METROLOGY, REAL METROLOGY, YIELD, AUTOMATED PROCESS CONTROL, RUN TO RUN CONTROL (R2R), SMART SAMPLING
Created April 09, 2018, Updated April 09, 2018