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Using characterized variable reservoir helium permeation leaks to generate low flows

Published

Author(s)

S A. Tison, Pardeep Mohan

Abstract

Fixed reservoir helium permeation leaks are frequently used to generate known flows for calibration of leak detectors. Determination of the flow from helium permeation leaks becomes difficult in the low flow range (10^-12 mol/s, 2x10^-8 std. cc/s 273.15 K, and below) which is of high interest to industrial and government users.
Citation
Journal of Vacuum Science & Technology A

Citation

Tison, S. and Mohan, P. (1993), Using characterized variable reservoir helium permeation leaks to generate low flows, Journal of Vacuum Science & Technology A, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920806 (Accessed February 28, 2024)
Created November 27, 1993, Updated February 17, 2017