@article{215156,
  author = {S Tison and Pardeep Mohan},
  title = {Using characterized variable reservoir helium permeation leaks to generate low flows},
  year = {1993},
  month = {1993-11-27},
  publisher = {Journal of Vacuum Science & Technology A},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920806},
  language = {en},
}