TY - JOUR AU - S Tison AU - Pardeep Mohan C2 - Journal of Vacuum Science & Technology A DA - 1993-11-27 LA - en PB - Journal of Vacuum Science & Technology A PY - 1993 TI - Using characterized variable reservoir helium permeation leaks to generate low flows UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920806 ER -