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Unified Model for Bulk Acoustic Wave Resonators’ Nonlinear Effects



Eduard Rocas, Juan C. Collado Gomez, James C. Booth, Enrique Iborra, Robert Aigner


We present a nonlinear model for Bulk Acoustic Wave resonators that combines different sources of nonlinearity, using device-independent material specific parameters, to predict the intermodulation and harmonics generation. The actual model accounts for the intrinsic nonlinearities arising from the stiffened elasticity and for thermal effects due to temperature changes into the sample when it is driven by an amplitude modulated signal. Nonlinear parameters of the AlN piezoelectric layer have been extracted, which could be used to predict the nonlinear distortion of more complex devices even driven by complex modulated signals.
Conference Dates
September 20-23, 2009
Conference Location
Conference Title
2009 International Ultrasonics Symposium


Intermodulation, thermal effects, second harmonic, Bulk Acoustic Wave resonators.


Rocas, E. , Collado, J. , Booth, J. , Iborra, E. and Aigner, R. (2009), Unified Model for Bulk Acoustic Wave Resonators’ Nonlinear Effects, 2009 International Ultrasonics Symposium, Roma, -1, [online], (Accessed April 19, 2024)
Created September 20, 2009, Updated November 10, 2018