Carver, G.
(1985),
Ultraclean semiconductor processing laboratory safe operating procedures manual:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.IR.85-3149
(Accessed April 25, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Ultraclean semiconductor processing laboratory safe operating procedures manual:
Published
Author(s)
Citation
- NBS IR 85-3149
Report Number
NBS IR 85-3149
Pub Type
NIST Pubs
Download Paper
Citation
Created January 1, 1985, Updated May 19, 2023