@misc{1176991,
  author = {G P Carver},
  title = {Ultraclean semiconductor processing laboratory safe operating procedures manual:},
  year = {1985},
  month = {1985-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.IR.85-3149},
  language = {en},
}