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Ultra-Thin Film Dielectric Reliability Characterization
Published
Author(s)
John S. Suehle
Citation
Gate Dielectric Integrity
Publisher Info
American Society for Testing and Materials, West Conshohocken, PA
Pub Type
Books
Citation
Suehle, J.
(2000),
Ultra-Thin Film Dielectric Reliability Characterization, American Society for Testing and Materials, West Conshohocken, PA
(Accessed May 29, 2023)