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Ultra-Thin Film Dielectric Reliability Characterization

Published

Author(s)

John S. Suehle
Citation
Gate Dielectric Integrity
Publisher Info
American Society for Testing and Materials, West Conshohocken, PA

Citation

Suehle, J. (2000), Ultra-Thin Film Dielectric Reliability Characterization, American Society for Testing and Materials, West Conshohocken, PA (Accessed June 16, 2024)

Issues

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Created January 1, 2000, Updated January 27, 2020