TY  - SER
AU  - John Suehle
C2  - American Society for Testing and Materials, West Conshohocken, PA
DA  - 2000-01-01
LA  - en
PB  - American Society for Testing and Materials, West Conshohocken, PA
PY  - 2000
TI  - Ultra-Thin Film Dielectric Reliability Characterization
ER  -