Many new compact ultra-precision linear translation stages with exceptionally long ranges of motion on the order of tens of millimeters and positioning resolutions on the order of a nanometer are finding their way into emerging nanotechnologies. This class of positioning system typically has specified linear error motions on the order of a few hundred nanometers or better and angular error motions on the order of 10 arcsec or better. However, measuring and certifying the positioning performance of these new stages with off-the-self instrumentation prescribed by international standards can be very challenging if the test uncertainty ratio is to be greater or equal to 4:1. This paper gives an overview of our effort to extend our measurement capabilities to measure the six error motions of a commercial nanopositioner that has a max travel of 110 mm and a positioning resolution of 1 nm. Test uncertainty ratios of 15:1 to 1.5:1 are achieved.
Proceedings Title: Proceedings of the 26th Annual Meeting of the American Society for Precision Engineering (ASPE)
Conference Dates: November 13-18, 2011
Conference Location: Denver, CO
Pub Type: Conferences
metrology, linear positioning, straightness, angular deviation, measurement uncertainty