Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

A Time Synchronization Testbed to Define and Standardize Real-Time Model-Based Control Capabilities in Semiconductor Manufacturing

Published

Author(s)

Deepak Sharma, Dhananjay Anand, Ya-Shian Li-Baboud, James Moyne

Abstract

Shrinking process tolerances due to decreasing device sizes and increasing chip complexity in semiconductor manufacturing are motivating efforts to improve methods for real-time networked process control. Prior work shows that the lack of precise time synchronization is a critical hindrance to reliable model generation or estimation for process diagnostics and control. This paper first presents an analysis of control data traffic and time synchronization performance over wired and wireless networks to illustrate the need and the challenges in generating high fidelity plant estimates. The paper then discusses a test-bed currently being implemented by the Engineering Research Center for Reconfigurable Manufacturing Systems at the University of Michigan, to explore methods to improve estimator performance using a time-stamped data model.
Proceedings Title
AEC/APC Symposium
Conference Dates
September 28-30, 2009
Conference Location
Ann Arbor, MI, US

Keywords

time synchronization, data quality, Equipment Data Acquisition standard, time-stamping

Citation

Sharma, D. , Anand, D. , Li-Baboud, Y. and Moyne, J. (2009), A Time Synchronization Testbed to Define and Standardize Real-Time Model-Based Control Capabilities in Semiconductor Manufacturing, AEC/APC Symposium, Ann Arbor, MI, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903792 (Accessed February 25, 2024)
Created September 27, 2009, Updated October 12, 2021