A Time Synchronization Testbed to Define and Standardize Real-Time Model-Based Control Capabilities in Semiconductor Manufacturing
Deepak Sharma, Dhananjay Anand, Ya-Shian Li-Baboud, James Moyne
Shrinking process tolerances due to decreasing device sizes and increasing chip complexity in semiconductor manufacturing are motivating efforts to improve methods for real-time networked process control. Prior work shows that the lack of precise time synchronization is a critical hindrance to reliable model generation or estimation for process diagnostics and control. This paper first presents an analysis of control data traffic and time synchronization performance over wired and wireless networks to illustrate the need and the challenges in generating high fidelity plant estimates. The paper then discusses a test-bed currently being implemented by the Engineering Research Center for Reconfigurable Manufacturing Systems at the University of Michigan, to explore methods to improve estimator performance using a time-stamped data model.
, Anand, D.
, Li-Baboud, Y.
and Moyne, J.
A Time Synchronization Testbed to Define and Standardize Real-Time Model-Based Control Capabilities in Semiconductor Manufacturing, AEC/APC Symposium, Ann Arbor, MI, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903792
(Accessed February 25, 2024)