A Time Synchronization Testbed to Define and Standardize Real-Time Model-Based Control Capabilities in Semiconductor Manufacturing

Published

September 28, 2009

Author(s)

Deepak Sharma, Dhananjay Anand, Ya-Shian Li-Baboud, James Moyne

Abstract

Shrinking process tolerances due to decreasing device sizes and increasing chip complexity in semiconductor manufacturing are motivating efforts to improve methods for real-time networked process control. Prior work shows that the lack of precise time synchronization is a critical hindrance to reliable model generation or estimation for process diagnostics and control. This paper first presents an analysis of control data traffic and time synchronization performance over wired and wireless networks to illustrate the need and the challenges in generating high fidelity plant estimates. The paper then discusses a test-bed currently being implemented by the Engineering Research Center for Reconfigurable Manufacturing Systems at the University of Michigan, to explore methods to improve estimator performance using a time-stamped data model.

Proceedings Title

AEC/APC Symposium

Conference Dates

September 28-30, 2009

Conference Location

Ann Arbor, MI, US

Pub Type

Conferences

Download Paper

Local Download

Keywords

time synchronization, data quality, Equipment Data Acquisition standard, time-stamping

Citation

Sharma, D. , Anand, D. , Li-Baboud, Y. and Moyne, J. (2009), A Time Synchronization Testbed to Define and Standardize Real-Time Model-Based Control Capabilities in Semiconductor Manufacturing, AEC/APC Symposium, Ann Arbor, MI, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903792 (Accessed April 20, 2024)