@conference{848141,
  author = {Deepak Sharma and Dhananjay Anand and Ya-Shian Li-Baboud and James Moyne},
  title = {A Time Synchronization Testbed to Define and Standardize Real-Time Model-Based Control Capabilities in Semiconductor Manufacturing},
  year = {2009},
  month = {2009-09-28 00:09:00},
  publisher = {AEC/APC Symposium, Ann Arbor, MI, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903792},
  language = {en},
}