Durgapal, P.
, Ehrstein, J.
and Nguyen, N.
(1998),
Thin Film Ellipsometry Metrology, Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA (Accessed July 30, 2026)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Thin Film Ellipsometry Metrology
Published
Author(s)
P. Durgapal, ,
Proceedings Title
Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology
Conference Dates
March 23-27, 1998
Conference Location
Gaithersburg, MD, USA
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created December 30, 1998, Updated October 12, 2021