Durgapal, P.
, Ehrstein, J.
and Nguyen, N.
(1998),
Thin Film Ellipsometry Metrology, Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA (Accessed April 25, 2026)
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Thin Film Ellipsometry Metrology
Published
Author(s)
P. Durgapal, ,
Proceedings Title
Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology
Conference Dates
March 23-27, 1998
Conference Location
Gaithersburg, MD, USA
Pub Type
Conferences
Citation
Issues
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Created December 30, 1998, Updated October 12, 2021