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Thin Film Ellipsometry Metrology

Published

Author(s)

P. Durgapal, James R. Ehrstein, Nhan Van Nguyen
Proceedings Title
Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology
Conference Dates
March 23-27, 1998
Conference Location
Gaithersburg, MD, USA

Citation

Durgapal, P. , Ehrstein, J. and Nguyen, N. (1998), Thin Film Ellipsometry Metrology, Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA (Accessed February 25, 2024)
Created December 30, 1998, Updated October 12, 2021