@conference{765466,
  author = {P. Durgapal and James Ehrstein and Nhan Nguyen},
  title = {Thin Film Ellipsometry Metrology},
  year = {1998},
  month = {1998-12-31 00:12:00},
  publisher = {Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA},
  language = {en},
}