Thickness and Composition Reference Standards for Semiconductor Metrology
Donald Windover, Victor H. Vartanian, Tom Kelly, Tom Larson, David L. Gil
This report from the MET16 project describes tests of X-ray reflectometry (XRR), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and atom probe tomography (APT) for thickness and compositional reference metrology.
SEMATECH Technology Transfer #11035149A-TR
Measuring Instruments, Spectroscopy, Standard Artifacts, Standard Reference Material, Thin Film Thickness, X-ray Diffraction, X-ray Reflectometry
, Vartanian, V.
, Kelly, T.
, Larson, T.
and Gil, D.
Thickness and Composition Reference Standards for Semiconductor Metrology, SEMATECH Technology Transfer #11035149A-TR
(Accessed December 1, 2023)