@misc{1292726,
  author = {Donald Windover and Victor Vartanian and Tom Kelly and Tom Larson and David Gil},
  title = {Thickness and Composition Reference Standards for Semiconductor Metrology},
  year = {2011},
  month = {2011-07-22 04:07:00},
  publisher = {SEMATECH Technology Transfer #11035149A-TR},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=909798},
  language = {en},
}