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Theory of Elastic Wave Propagation in an Anisotropic Film on an Anisotropic Substrate: TiN Film on Single Crystal Si

Published

Author(s)

Vinod K. Tewary

Abstract

The delta function representation of the elastodynamic Green's function is used to derive an expression for the elastic wave forms on the surface of an anisotropic thin film on an anisotropic substrate due to a point or a line source located at the surface of the film. The dispersion relation for surface acoustic waves (SAWs) is obtained from the poles of the Green's function. A computationally efficient algorithm is formulated to obtain the elastic constants and the density of the film from the measured SAW dispersion data. The theory is used to analyze measured SAW dispersion relations in a titanium nitride film on silicon. The analysis yields values of the elastic constants and the density fo the film. Excellent agreement is obtained between the theoretical and experimental dispersion results. Calculated waveforms for the surface wave due to a pulsed line source on the surface of the film are reported.
Citation
Journal of the Acoustical Society of America
Volume
112
Issue
No. 3

Keywords

elastic anisotropy, elastic characterization, elastic waves, elastodynamic Green's function, layered solids, thin films, titanium nitride

Citation

Tewary, V. (2002), Theory of Elastic Wave Propagation in an Anisotropic Film on an Anisotropic Substrate: TiN Film on Single Crystal Si, Journal of the Acoustical Society of America (Accessed July 23, 2024)

Issues

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Created September 1, 2002, Updated February 17, 2017