@article{163446,
  author = {Vinod Tewary},
  title = {Theory of Elastic Wave Propagation in an Anisotropic Film on an Anisotropic Substrate: TiN Film on Single Crystal Si},
  year = {2002},
  number = {112},
  month = {2002-09-01},
  publisher = {Journal of the Acoustical Society of America},
  language = {en},
}