TY - JOUR AU - Vinod Tewary C2 - Journal of the Acoustical Society of America DA - 2002-09-01 LA - en M1 - 112 PB - Journal of the Acoustical Society of America PY - 2002 TI - Theory of Elastic Wave Propagation in an Anisotropic Film on an Anisotropic Substrate: TiN Film on Single Crystal Si ER -