Bullis, W.
, Perkowitz, S.
and Seiler, D.
(1995),
Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.400-98
(Accessed December 12, 2024)
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Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry:
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- NIST SP 400-98
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NIST SP 400-98
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NIST Pubs
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Created January 1, 1995, Updated May 20, 2023