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Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry:

Published

Author(s)

W Murray Bullis, S Perkowitz, D G Seiler
Citation
- NIST SP 400-98
Report Number
NIST SP 400-98

Citation

Bullis, W. , Perkowitz, S. and Seiler, D. (1995), Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.400-98 (Accessed April 21, 2024)
Created January 1, 1995, Updated May 20, 2023