@misc{1196661,
  author = {W Murray Bullis and S Perkowitz and D G Seiler},
  title = {Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry:},
  year = {1995},
  month = {1995-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.SP.400-98},
  language = {en},
}