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PUBLICATIONS

Surface Metrology of Soft X-ray Optics

Published

Author(s)

Theodore V. Vorburger, T. McWade, Joseph Fu, Christopher J. Evans, William T. Estler, R Parks

Abstract

Abstract not available.
Proceedings Title
Proceedings of 3rd Soft X-ray Projection Lithography, Optical Society of America, Washington, DC, 1993
Conference Dates
January 1, 1993
Conference Location
Unknown
Pub Type
Conferences
Manufacturing and Metrology

Citation

Vorburger, T. , McWade, T. , Fu, J. , Evans, C. , Estler, W. and Parks, R. (1993), Surface Metrology of Soft X-ray Optics, Proceedings of 3rd Soft X-ray Projection Lithography, Optical Society of America, Washington, DC, 1993, Unknown, -1 (Accessed October 5, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 1993, Updated February 19, 2017