TY  - CONF
AU  - Theodore Vorburger
AU  - T. McWade
AU  - Joseph Fu
AU  - Christopher Evans
AU  - William Estler
AU  - R Parks
C2  - Proceedings of 3rd Soft X-ray Projection Lithography, Optical Society of America, Washington, DC, 1993, Unknown, -1
DA  - 1993-01-01
LA  - en
PB  - Proceedings of 3rd Soft X-ray Projection Lithography, Optical Society of America, Washington, DC, 1993, Unknown, -1
PY  - 1993
TI  - Surface Metrology of Soft X-ray Optics
ER  -