@conference{104586,
  author = {Theodore Vorburger and T. McWade and Joseph Fu and Christopher Evans and William Estler and R Parks},
  title = {Surface Metrology of Soft X-ray Optics},
  year = {1993},
  month = {1993-01-01},
  publisher = {Proceedings of 3rd Soft X-ray Projection Lithography, Optical Society of America, Washington, DC, 1993, Unknown, -1},
  language = {en},
}