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Summary of ISO/TC 201 Technical Report: ISO/TR 19319: 2003 Surface Chemical Analysis Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy Determination of Lateral Resolution, Analysis Area, and Sample Area Viewed by the Analyser

Published

Author(s)

Cedric J. Powell

Abstract

ISO Technical Report 19319 contains information on the determination of lateral resolution, analysis area, and sample area viewed by the analyser in surface analyses by Auger-electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS). This article provides a brief summary of this information.
Citation
Surface and Interface Analysis
Volume
36
Issue
No. 7

Keywords

analysis area, Auger Electron Spectroscopy, International Organization for Standardi, lateral resolution, sample area viewed by the analyzer, x-ray photoelectron spectroscopy

Citation

Powell, C. (2004), Summary of ISO/TC 201 Technical Report: ISO/TR 19319: 2003 Surface Chemical Analysis Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy Determination of Lateral Resolution, Analysis Area, and Sample Area Viewed by the Analyser, Surface and Interface Analysis (Accessed March 3, 2024)
Created July 1, 2004, Updated February 17, 2017