Powell, C.
(2004),
Summary of ISO/TC 201 Technical Report: ISO/TR 19319: 2003 Surface Chemical Analysis Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy Determination of Lateral Resolution, Analysis Area, and Sample Area Viewed by the Analyser, Surface and Interface Analysis
(Accessed April 26, 2024)
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Summary of ISO/TC 201 Technical Report: ISO/TR 19319: 2003 Surface Chemical Analysis Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy Determination of Lateral Resolution, Analysis Area, and Sample Area Viewed by the Analyser
Published
Author(s)
Abstract
ISO Technical Report 19319 contains information on the determination of lateral resolution, analysis area, and sample area viewed by the analyser in surface analyses by Auger-electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS). This article provides a brief summary of this information.Citation
Surface and Interface Analysis
Volume
36
Issue
No. 7
Pub Type
Journals
Keywords
analysis area, Auger Electron Spectroscopy, International Organization for Standardi, lateral resolution, sample area viewed by the analyzer, x-ray photoelectron spectroscopy
Citation
Created July 1, 2004, Updated February 17, 2017