Subsurface imaging of biased structures with electrostatic force microscopy (EFM)

Published

April 2, 2018

Author(s)

Lin You, Yaw S. Obeng, Joseph Kopanski

Abstract

In subsurface imaging applications, contrast in EFM depends on the electrostatic force between the tip and sample. In the related technique, scanning Kelvin force microscopy (SKFM) contrast arises from the force due to capacitance gradient with tip-to-sample distance (dC/dz). These measured quantities arise from variations in sample dielectric constant, any charge accumulated on subsurface structures, and subsurface variations in conductivity. Our technique allows us to independently bias the subsurface structures and thereby, separate the effect of buried charge and capacitance gradient.

Proceedings Title

Meeting Program of the 2018 Materials Research Society Meeting

Conference Dates

April 2-6, 2018

Conference Location

Phoenix, AZ, US

Conference Title

2018 Spring Meeting of the Materials Research Society

Pub Type

Conferences

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Keywords

EFM, electrostatic force microscopy, subsurface imaging

Citation

You, L. , Obeng, Y. and Kopanski, J. (2018), Subsurface imaging of biased structures with electrostatic force microscopy (EFM), Meeting Program of the 2018 Materials Research Society Meeting, Phoenix, AZ, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=924699 (Accessed October 11, 2025)