@conference{808366,
  author = {Lin You and Yaw Obeng and Joseph Kopanski},
  title = {Subsurface imaging of biased structures with electrostatic force microscopy (EFM)},
  year = {2018},
  month = {2018-04-02 00:04:00},
  publisher = {Meeting Program of the 2018 Materials Research Society Meeting, Phoenix, AZ, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=924699},
  language = {en},
}