Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Submillimeter-Wavelength Plasma Diagnostics For Semiconductor Manufacturing, ed. by D.G. Seiler, A.C. Diebold, T.J. Schaffner, R. McDonald, S. Zollner, R.P. Khosla, and E.M. Secula

Published

Author(s)

Eric C. Benck, G Y. Golubiatnikov, Gerald T. Fraser, D L. Pluesquelic, B Ji, S A. Motika, E J. Karwacki
Proceedings Title
Characterization and Metrology for ULSI Technology: 2003 International Conference
Volume
C
Conference Dates
March 24-28, 2003
Conference Location
Austin, TX
Conference Title
Proc. 2003 International Conference

Citation

Benck, E. , Golubiatnikov, G. , Fraser, G. , Pluesquelic, D. , Ji, B. , Motika, S. and Karwacki, E. (2003), Submillimeter-Wavelength Plasma Diagnostics For Semiconductor Manufacturing, ed. by D.G. Seiler, A.C. Diebold, T.J. Schaffner, R. McDonald, S. Zollner, R.P. Khosla, and E.M. Secula, Characterization and Metrology for ULSI Technology: 2003 International Conference, Austin, TX (Accessed December 7, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created March 1, 2003, Updated February 17, 2017