Benck, E.
, Golubiatnikov, G.
, Fraser, G.
, Pluesquelic, D.
, Ji, B.
, Motika, S.
and Karwacki, E.
(2003),
Submillimeter-Wavelength Plasma Diagnostics For Semiconductor Manufacturing, ed. by D.G. Seiler, A.C. Diebold, T.J. Schaffner, R. McDonald, S. Zollner, R.P. Khosla, and E.M. Secula, Characterization and Metrology for ULSI Technology: 2003 International Conference, Austin, TX
(Accessed October 27, 2025)
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Submillimeter-Wavelength Plasma Diagnostics For Semiconductor Manufacturing, ed. by D.G. Seiler, A.C. Diebold, T.J. Schaffner, R. McDonald, S. Zollner, R.P. Khosla, and E.M. Secula
Published
Author(s)
, G Y. Golubiatnikov, , D L. Pluesquelic, B Ji, S A. Motika, E J. Karwacki
Proceedings Title
Characterization and Metrology for ULSI Technology: 2003 International Conference
Volume
C
Conference Dates
March 24-28, 2003
Conference Location
Austin, TX
Conference Title
Proc. 2003 International Conference
Pub Type
Conferences
Citation
Issues
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Created March 1, 2003, Updated February 17, 2017