@conference{144136, author = {Eric Benck and G Golubiatnikov and Gerald Fraser and D Pluesquelic and B Ji and S Motika and E Karwacki}, title = {Submillimeter-Wavelength Plasma Diagnostics For Semiconductor Manufacturing, ed. by D.G. Seiler, A.C. Diebold, T.J. Schaffner, R. McDonald, S. Zollner, R.P. Khosla, and E.M. Secula}, year = {2003}, number = {C}, month = {2003-03-01}, publisher = {Characterization and Metrology for ULSI Technology: 2003 International Conference, Austin, TX}, language = {en}, }