TY - CONF AU - Eric Benck AU - G Golubiatnikov AU - Gerald Fraser AU - D Pluesquelic AU - B Ji AU - S Motika AU - E Karwacki C2 - Characterization and Metrology for ULSI Technology: 2003 International Conference, Austin, TX DA - 2003-03-01 LA - en M1 - C PB - Characterization and Metrology for ULSI Technology: 2003 International Conference, Austin, TX PY - 2003 TI - Submillimeter-Wavelength Plasma Diagnostics For Semiconductor Manufacturing, ed. by D.G. Seiler, A.C. Diebold, T.J. Schaffner, R. McDonald, S. Zollner, R.P. Khosla, and E.M. Secula ER -