Benck, E.
, Golubiatnikov, G.
, Fraser, G.
, Ji, B.
, Motika, S.
and Karwacki, E.
(2003),
Submillimeter-Wavelength Plasma Chemical Diagnostics for Semiconductor Manufacturing, Journal of Vacuum Science and Technology B
(Accessed April 19, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Submillimeter-Wavelength Plasma Chemical Diagnostics for Semiconductor Manufacturing
Published
Author(s)
, G Y. Golubiatnikov, , B Ji, S A. Motika, E J. Karwacki
Citation
Journal of Vacuum Science and Technology B
Volume
21
Pub Type
Journals
Citation
Created January 1, 2003, Updated February 17, 2017