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Submillimeter-Wavelength Plasma Chemical Diagnostics for Semiconductor Manufacturing

Published

Author(s)

Eric C. Benck, G Y. Golubiatnikov, Gerald T. Fraser, B Ji, S A. Motika, E J. Karwacki
Citation
Journal of Vacuum Science and Technology B
Volume
21

Citation

Benck, E. , Golubiatnikov, G. , Fraser, G. , Ji, B. , Motika, S. and Karwacki, E. (2003), Submillimeter-Wavelength Plasma Chemical Diagnostics for Semiconductor Manufacturing, Journal of Vacuum Science and Technology B (Accessed June 19, 2024)

Issues

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Created January 1, 2003, Updated February 17, 2017