TY  - JOUR
AU  - Eric Benck
AU  - G Golubiatnikov
AU  - Gerald Fraser
AU  - B Ji
AU  - S Motika
AU  - E Karwacki
C2  - Journal of Vacuum Science and Technology B
DA  - 2003-01-01
LA  - en
M1  - 21
PB  - Journal of Vacuum Science and Technology B
PY  - 2003
TI  - Submillimeter-Wavelength Plasma Chemical Diagnostics for Semiconductor Manufacturing
ER  -