Renegar, T.
, Soons, J.
, Muralikrishnan, B.
, Villarrubia, J.
, Zheng, X.
, Vorburger, T.
and Song, J.
(2012),
Stylus Tip-Size Effect on the Calibration of Periodic Roughness Specimens with Rectangular Profiles, 3rd International Conference on Surface Metrology, Annecy, -1, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911079
(Accessed November 2, 2024)