TY  - CONF
AU  - Thomas Renegar
AU  - Johannes Soons
AU  - Balasubramanian Muralikrishnan
AU  - John Villarrubia
AU  - Xiaoyu Zheng
AU  - Theodore Vorburger
AU  - Jun-Feng Song
C2  - 3rd International Conference on Surface Metrology, Annecy, -1
DA  - 2012-03-21
LA  - en
PB  - 3rd International Conference on Surface Metrology, Annecy, -1
PY  - 2012
TI  - Stylus Tip-Size Effect on the Calibration of Periodic Roughness Specimens with Rectangular Profiles
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911079
ER  -