@conference{31896,
  author = {Thomas Renegar and Johannes Soons and Balasubramanian Muralikrishnan and John Villarrubia and Xiaoyu Zheng and Theodore Vorburger and Jun-Feng Song},
  title = {Stylus Tip-Size Effect on the Calibration of Periodic Roughness Specimens with Rectangular Profiles},
  year = {2012},
  month = {2012-03-21},
  publisher = {3rd International Conference on Surface Metrology, Annecy, -1},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911079},
  language = {en},
}