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Studies of Ion Kinetic-Energy Distributions in the Gaseous Electronics Conference RF Reference Cell

Published

Author(s)

James K. Olthoff, Richard J. Van Brunt, S. B. Radovanov
Citation
Journal of Research (NIST JRES) -
Volume
100
Issue
4

Citation

Olthoff, J. , Van Brunt, R. and Radovanov, S. (1995), Studies of Ion Kinetic-Energy Distributions in the Gaseous Electronics Conference RF Reference Cell, Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=22332 (Accessed February 28, 2024)
Created June 30, 1995, Updated October 12, 2021