Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Structural Comparison of Hydrogen Silsesquioxane Based Porous Low-k Thin Films Prepared With Varying Process Conditions

Published

Author(s)

V. J. Lee, Eric K. Lin, Haonan Wang, Wen-Li Wu, W Chen, T A. Deis, E S. Moyer

Abstract

The structure of hydrogen silsesquioxane (HSQ) based porous low dielectric constant (low-k) films (XLK ) prepared with varying process conditions are characterized using a combination of high energy ion scattering, x-ray reflectivity (SXR), and small angle neutron scattering (SANS). We measure the film thickness, average mass density, density depth profile, wall density, porosity, average pore size, pore spacing, pore connectivity, and atomic composition. We compare samples with varying dielectric constants and degrees of cure or Si-H bonding fraction. The structural parameters are correlated with the chemical bond structure as measured by Fourier transform infrared (FTIR) spectroscopy. The density profiles of the porous films were uniform with a slight densification observed at the film surface. Films with similar k values but varying degrees of cure have almost identical structural characteristics. Lower dielectric constant films have larger porosities and average pore sizes, but lower wall densities. The process conditions used to alter the dielectric constant affect not only the porosity, but also many other structural parameters such as the wall density.
Citation
Chemistry of Materials
Volume
14
Issue
No. 4

Keywords

density profile, density profile, hydrogen silsesquioxane, porosity, porous low-k dielectric, small angle neutron scattering (SANS), wall density, wall density, x-ray reflectivity

Citation

Lee, V. , Lin, E. , Wang, H. , Wu, W. , Chen, W. , Deis, T. and Moyer, E. (2002), Structural Comparison of Hydrogen Silsesquioxane Based Porous Low-k Thin Films Prepared With Varying Process Conditions, Chemistry of Materials, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851949 (Accessed June 19, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created March 31, 2002, Updated October 12, 2021